Thermal conductivity measurement of suspended Si-N membranes from 10 K to 275 K using the 3ω-Völklein method
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چکیده
منابع مشابه
Specific heat measurement of thin suspended SiN membrane from 8 K to 300 K using the 3ω-Völklein method.
We present a specific heat measurement technique adapted to thin or very thin suspended membranes from low temperature (8 K) to 300 K. The presented device allows the measurement of the heat capacity of a 70 ng silicon nitride membrane (50 or 100 nm thick), corresponding to a heat capacity of 1.4 × 10(-10) J/K at 8 K and 5.1 × 10(-8) J/K at 300 K. Measurements are performed using the 3ω method ...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2012
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/395/1/012109